Clean Room Laboratory

Laboratory Name  Clean Room Laboratory
Laboratory Responsible

Prof. Dr. Ahmet Yavuz Oral

Dr. Şafak Gök

Department Institute of Nanotechnology
Adress  Gebze Technical University, Institute of Nanotechnology, R-Block
General Information

Controlled and particle-sterilized clean room area for coating organic and/or inorganic, conductive, insulating, and semiconductive materials using different corrosion methods for horizontal and vertical configurations with the best resolution 1 micrometer for this laboratory

Laboratory Photography  
Applications

*Chromium mask preparation with 1 micrometer resolution.

*Pattern print on substrate with a resolution of 1 micrometer by laser lithography.

*Masking and uv exposing on photoresist coated substrate by MJB4 mask aligner.

*Organic and inorganic spin coating

*Surface cleaning by chemicals

Equipment

* HEIDELBERG - dwl66fs lazer litografi sistemi

* SUSS - MJB4 Maske hizalama ve alttaş üzerine desen baskı sistemi

* Nikon- eclipse LV150- 100x zoom mikroskop

* Brewer science – Cee 200x spin kaplama cihazı

* Stuart - sd300 digital hotplate

* Bandelin - Sonorex- ultrasonik banyo

Projects

Tübitak BİDEB 2232 and ARDEB projects.

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