Clean Room Laboratory
| Laboratory Name | Clean Room Laboratory |
| Laboratory Responsible |
Prof. Dr. Ahmet Yavuz Oral Dr. Şafak Gök |
| Department | Institute of Nanotechnology |
| Adress | Gebze Technical University, Institute of Nanotechnology, R-Block |
| General Information |
Controlled and particle-sterilized clean room area for coating organic and/or inorganic, conductive, insulating, and semiconductive materials using different corrosion methods for horizontal and vertical configurations with the best resolution 1 micrometer for this laboratory |
| Laboratory Photography |  |
| Applications |
*Chromium mask preparation with 1 micrometer resolution. *Pattern print on substrate with a resolution of 1 micrometer by laser lithography. *Masking and uv exposing on photoresist coated substrate by MJB4 mask aligner. *Organic and inorganic spin coating *Surface cleaning by chemicals |
| Equipment |
* HEIDELBERG - dwl66fs lazer litografi sistemi * SUSS - MJB4 Maske hizalama ve alttaş üzerine desen baskı sistemi * Nikon- eclipse LV150- 100x zoom mikroskop * Brewer science – Cee 200x spin kaplama cihazı * Stuart - sd300 digital hotplate * Bandelin - Sonorex- ultrasonik banyo |
| Projects |
Tübitak BİDEB 2232 and ARDEB projects. |
